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CFD analysis on gas distribution for different scrubber

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ion etching of SiC in SF6 gas: detection of CF, CF2 and

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ive photoacoustic multicomponent gas sensor for SF6

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(SF6) decomposition analysis was developed by means of a background-gas-The watt-level excitation laser power compensates the ivity loss as a

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The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this

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An Assessment of Eco-friendly Gases for Electrical Insulation

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NALFSF6,SF6

An improved method of supplying pressurized cold gas consistently of predominately N 2 and He at low flow rate (typically under 1 g/s) with a desired